• 专利附录
  • 专利说明
  • 权利要求
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    • 专利摘要:
    The invention relates to a chemical bath for depositing a layer based on at least metal and sulfur. It also relates to a method for depositing such a layer. This bath comprises in solution: a metal salt comprising a metal chosen from at least one of the elements of groups IIB and IIIA of the periodic table; and - a sulfur precursor. The bath further comprises a compound of morpholine type.
    公开号:FR3014909A1
    申请号:FR1362539
    申请日:2013-12-12
    公开日:2015-06-19
    发明作者:Thibaud Hildebrandt；Negar Naghavi；Nicolas Loones；Nathanaelle Schneider
    申请人:Electricite de France SA；Centre National de la Recherche Scientifique CNRS；
    IPC主号:
    专利说明:

    [0001] BACKGROUND OF THE INVENTION The invention relates to the field of chemical deposition baths for the deposition of layers based on sulfur and metal. It also relates to chemical deposition processes of a layer based on metal and sulfur. BACKGROUND OF THE INVENTION [0002] Chemical Bath Deposition (CBD) processes are commonly used in industry to manufacture, for example, thin-layer alloys. These methods are particularly suitable for large scale deposits for covering large areas exceeding 60 x 30 cm2. Moreover, this technique is largely controlled in the industry due in particular to its low cost and technical simplicity.
    [0002] In this regard, a chemical deposit in a bath can be envisaged in the manufacture of certain thin layers of photosensitive devices. More particularly, the absorber layers that comprise certain photosensitive devices are generally covered by a so-called buffer layer made of an alloy comprising metal and sulfur. Generally, this buffer layer consists of a CdS sulfur cadmium alloy. The toxicity of cadmium nonetheless invites the search for alternative materials for the buffer layer, such as zinc sulphide ZnS and its derivatives. However, the deposition rate of these alloys on any surface and in particular on other thin layers such as light absorbers, is not optimized. Obtaining a deposit chemically consistent with industry requirements can thus involve times considered long, greater than 15 minutes or an hour. Such an extension of the filing time leads to additional manufacturing costs and penalizes the entire production line of a device.
    [0003] For this reason, particular attention is paid to the search for technical means for depositing a layer based on at least sulfur and a metal by CBD. In order to reduce the deposition time of such a layer, it is known to increase either the concentration of the reagents of the chemical bath, its temperature or even to preheat the reagents. These three means nevertheless have the disadvantage of causing an increase in the consumption of material and energy. Moreover, they may also present a risk of deterioration of the deposition surface, or even involve additional steps in a production line likely to generate an additional cost. Another solution for accelerating deposition rates is to use a particular sulfur precursor in a chemical bath. Generally, the chemical baths for the deposition of a layer of metal and sulfur involve as a sulfur precursor a solution of thiourea. US2013 / 0084401 proposes to replace the thiourea with thioacetamide. This alternative nevertheless has the disadvantage that thioacetamide is a highly toxic compound and therefore unsuitable for industrial application. Another alternative suggested in document DE102009015063A1 consists in adding hydrogen peroxide H202 in a chemical bath intended for the deposition of a thin film based on sulfur and metal. This solution is not suitable for industrial applications in which the deposition surface is fragile, given the corrosive nature of the H202 additive. For these reasons, it is sought a means for increasing the deposition rate in a chemical bath of a layer comprising at least sulfur and a metal and which is compatible with a wide range of industrial applications. SUMMARY OF THE INVENTION In order to meet the problems described above, the present invention proposes a chemical bath for depositing a layer based on at least metal and sulfur. This bath comprises in solution: a metal salt comprising a metal chosen from at least one of the elements of groups IIB and IIIA of the periodic table; and - a sulfur precursor. This bath further comprises a compound of morpholine type.
    [0004] A bath for the chemical deposition of a layer comprising sulfur and a metal from groups IIB or IIIA of the periodic table is thus optimized by adding to the mixture in solution of the bath a non-toxic organic additive of morpholine type. The applicant has found that the addition of morpholine produces in the mixture an effect comparable to that of a reaction accelerator. Indeed, morpholine seems to interact with the sulfur precursor by promoting its hydrolysis, like a basic pH solution such as ammonia. In this way, the presence of morpholine can accelerate the formation of the sulfur-based alloy and metal on the deposition surface. Morpholine is an organic compound having both an amine function, conferred by the presence of a group -NH (amine function), and an ether function (- O-). The combination of these two functions can act on metal salt ions, for example Zn2 +, by promoting their integration into complexes. These complexes are involved in the reaction to deposit the metal and sulfur in the same layer.
    [0005] The increase in the deposition rate is an effect which seems particularly pronounced when the metal belongs to groups IIB or IIIA, such as zinc Zn or indium In. In addition, in addition to increasing the deposition rate, the Applicant has found that the addition of morpholine makes it possible to obtain homogeneous metal and sulfur-based layers over large areas. The addition of morpholine in the chemical bath thus makes it possible to obtain a homogeneous deposition over a large surface with respect to CBD deposits involving baths without this additive. Another advantageous effect conferred by the addition of morpholine lies in the fact that the deposit can be envisaged without preheating the reagents of the bath. By eliminating an earlier preheating step, it is possible to increase the production rate on an industrial scale. However, preheating of the reagents can also be envisaged, so that the bath described above can easily be prepared in pre-existing production lines.
    [0006] The addition of morpholine in a chemical deposition bath also has the advantage that it gives the reaction mixture of the bath a basic pH. With an acid constant pKa of 8.5, morpholine can be considered in a bath without an ammonia solution. In fact, the ammonia which is generally found in the CBD deposition baths has the function of increasing the pH of a reaction mixture to promote the hydrolysis of the compounds. This same function can advantageously be fulfilled by morpholine, thus making it possible to save reagents during the preparation of the bath. These different effects are independent of the surface on which the deposit is made.
    [0007] In particular, the optimized bath described above makes it possible for example to deposit on glass, metal or semiconductor substrates as well as on compounds with photovoltaic properties such as absorbers. Likewise, these effects have been observed in different experimental configurations and appear to occur independently of the concentration of the chemical bath reagents. It is, however, advantageously preferred to have a temperature below the denaturation threshold of one of the compounds of the reaction mixture. According to an advantageous embodiment, the compound may have the chemical formula C4H9NO.
    [0008] This compound may advantageously be present in a solution that is miscible with the other reagents of the chemical bath. It has been noticed that the morpholine compound of chemical formula C4H9NO optimizes in a particularly visible manner the deposition rate and the homogeneity of the layer obtained. However, the active ingredient of morpholine is also found in a wide range of derived molecules, further comprising an ether function and an amine function. Therefore other morpholine-based compounds could be envisaged. According to one embodiment, a concentration of between 0.001 mol / l and 10 mol / l of morpholine may be provided in the bath for a concentration of between 0.05 mol / l and 1 mol / l of the sulfur compound. Such a reaction mixture in the bath corresponds to a compromise between the quantity of reagents used and the rapidity of the deposition. Indeed, in striving to maintain a small amount of additive and sulfur compound, it is possible to achieve substantial savings in industrial scale production. This includes reducing the waste of reagents. Advantageously, the solution containing the metal salt may be a solution chosen from: zinc sulphate, zinc acetate and zinc chloride with a concentration of between 0.01 mol / l and 1 mol / l. The metal salt may comprise other metals from Groups IIB and IIIA of the Periodic Table. However, a zinc metal salt in the bath has made it possible to obtain a particularly marked reduction in the deposition time. In fact, with respect to a CBD deposit in a morpholine-free bath involving a zinc metal salt, the invention makes it possible to achieve a deposition rate that can be up to four times higher. A concentration of between 0.01 mol / l and 1 mol / l of metal salt makes it possible in particular to reduce the quantity of raw material used to deposit the layer.
    [0009] According to one embodiment, the bath may also comprise an ammonia solution with a concentration of less than 10 mol / L. The use of an ammonia solution makes it possible to confer a basic pH on the chemical bath, so as to initiate hydrolyzing the sulfur precursor to react with the metal salt. According to one embodiment, the bath may be free of ammonia solution. Given the naturally basic nature of morpholine in solution, it is possible not to add ammonia to the chemical bath. In this way, the invention makes it possible to save reagents during the preparation of the bath. It turns out that morpholine is an effective substitute for ammonia, despite an acidity constant pKa value 8.5, a value of 0.75 lower than the acidity constant of ammonia.
    [0010] According to one embodiment, the solution containing the sulfurized compound may be a solution of thiourea CS (NH 2) 2. Thiourea is a sulfur precursor particularly suitable for the deposition of layers comprising sulphide. It is widely used in the industry of photosensitive devices for example.
    [0011] Moreover, thiourea allows a particularly rapid deposition in the presence of morpholine and a metal salt. The deposition rates obtained when thiourea is used can thus be less than 5 minutes for a metal sulphide or oxysulphide layer 20 nm thick.
    [0012] More particularly, the metal may be an element of column IIB. Column IIB metals are of particular interest to the photosensitive device industry. In these devices, metals such as cadmium or zinc may be present in the buffer layer between the absorber and the electrical contact before a photosensitive cell. The elements of column IIB are therefore particularly suitable for a chemical bath intended for the production of buffer layers. According to a particular embodiment, the metal may be zinc. The CBD deposition of a zinc sulfide or oxysulfide layer is of interest for example in the industry of photosensitive devices because of its optical properties and its non-toxicity. Indeed, a layer made of such an alloy is an effective and nontoxic alternative to CdS buffer layers, while allowing to transmit more radiation wavelength less than 500 nm. A zinc sulfide or oxysulfide layer has a higher energy bandgap than a CdS layer, thereby transmitting more light with a wavelength of less than 500 nm than a CdS layer. On the other hand, a zinc sulfide or oxysulfide layer has optical transmission properties equivalent to those of ZnO zinc oxide layers, often used to form front electrical contacts in photosensitive devices.
    [0013] The invention also relates to a process for the chemical deposition of a layer based on at least metal and sulfur, in a bath comprising in solution: a metal salt comprising a metal chosen from at least one of the elements of groups IIB and IIIA of the periodic table; and - a sulfur precursor. In addition, a morpholine compound is provided in the bath. The deposition of a layer based at least on metal and sulfur by CBD by adding morpholine in the chemical bath offers several advantages, described above. The addition of morpholine in the bath increases the speed of the deposit, leads to more homogeneous layers, and allows to consider a saving of preparation time by the possible suppression of an earlier step of preheating bath reagents chemical. In a particular embodiment, the layer may be based on metal sulphide. Metal sulfide, for example ZnS, may be an alloy particularly suitable for applications in photosensitive devices. For example, it can be used as a buffer layer on absorbers of photosensitive devices.
    [0014] In another embodiment, the layer may be based on metal oxysulfide. Metal oxysulfides, such as, for example, Zn (S, O), Zn (S, O, OH) or In x (S, O) y, In x (S, O, H), with 0 <x <2 and 0 <y <3, may have optical properties particularly suited to the needs of the industry of photosensitive devices. They can also be adapted for use as buffer layers on a photosensitive layer. Advantageously, the temperature of the bath during the deposition may be between 40 ° C and 100 ° C. A deposition temperature of less than 100 ° C. and in particular less than 70 ° C. makes it possible to envisage a less damaging working environment for devices comprising alloys with a low melting temperature, without being penalized by an increase in the duration of the deposition. Moreover, by reducing the temperature of the reaction medium, it is possible to achieve energy savings by heating less a CBD deposition bath. The economy is all the more important as the size of the bath is large, this size can reach in the industry several square meters. According to one embodiment, the layer based on metal and sulfur may be deposited on a layer with photovoltaic properties, said layer with photovoltaic properties forming thin-film solar cell absorber.
    [0015] In this manner, the metal-sulfur layer may be a buffer layer, deposited on a thin-film photovoltaic cell absorber, for interfacing the absorber with a forward electrical contact. The quality of the junction between the absorber of a photosensitive cell and the buffer layer is crucial to achieve a high conversion efficiency in the resulting device. The application of the chemical deposition method described above for the deposition of a buffer layer on an absorber makes it possible to obtain homogeneous layers having half as many defects as buffer layers deposited in a bath containing no morpholine, deposited in a single layer. time less than 10 minutes and without damaging the absorber itself.
    [0016] Due to the quality of the buffer layer obtained by implementing the method, the resulting photovoltaic device can have a conversion efficiency greater than 14%. It should be noted that the use of morpholine as an additive in a chemical bath for depositing a buffer layer on a photovoltaic cell absorber is counterintuitive. Indeed, morpholine is generally used in the rubber industry or for the synthesis of drugs and phytosanitary products. In particular, the absorber may be based on a chalcopyrite compound among Cu (In, Ga) (S, Se) 2, Cu 2 (Zn, Sn) (S, Se) 4 and their derivatives.
    [0017] These compounds may for example comprise Cu (In, Ga) Se2, CuInSe2, CuInS2, CuGaSe2, Cu2 (Zn, Sn) S4 and Cu2 (Zn, Sn) Se4. When these absorbers contain zinc and tin, they are sometimes named CZTS. The solar cell absorbers listed above correspond to CIGS, CZTS type thin-film absorbers and their derivatives having conversion efficiencies of greater than 20%. The implementation of the method described above for depositing a buffer layer on these absorbers is particularly advantageous given the performance gains it provides. For example, by depositing a buffer layer of ZnS, Zn (S, O) or Zn (S, O, OH) on an absorber based on a chalcopyrite compound, it is possible to obtain a conversion efficiency higher than 14%, an open circuit voltage and a short circuit current of the final device higher than those observed in devices obtained by other deposition methods. DESCRIPTION OF THE FIGURES The method which is the subject of the invention will be better understood on reading the following description of exemplary embodiments presented for illustrative purposes, in no way limiting, and on the observation of the following drawings in which: FIG. 1 is a schematic representation of a sample for receiving the deposition of a layer of metal and sulfur; and - Figure 2 is a schematic representation of the procedure for preparing a chemical bath; and FIG. 3 is a graph comparing the measured deposition times to obtain different layer thicknesses according to three different methods; and - Figure 4 is a schematic representation of a photosensitive device; and FIG. 5 is a graph comparing the quantum efficiencies of two layers made of different materials as a function of the received wavelength.
    [0018] For the sake of clarity, the dimensions of the various elements shown in these figures are not necessarily in proportion to their actual dimensions. In the figures, identical references correspond to identical elements. DETAILED DESCRIPTION The invention relates to an improved chemical deposition bath and CBD deposition process. The improvement is aimed in particular at significantly increasing the deposition rate. Other advantageous effects have also been obtained in the context of the invention, such as, for example, increased deposition quality. In the exemplary embodiments hereinafter, the particular case of CBD deposition of a buffer layer on a photovoltaic cell absorber will be described. However, the invention can also be applied to a deposit on any other type of surface, as will be recalled later. In the context of deposition of a thin layer comprising at least sulfur and a metal, Figure 1 illustrates an example of an initial sample 100, comprising a substrate 101, a rear metal contact 102 and an absorber layer 103. The initial sample 100 illustrated thus represents an uncompleted portion of a thin-film photosensitive device. For example, the absorber 103 for converting radiation into a current may be a chalcopyrite-type compound such as one of Cu (In, Ga) (S, Se) 2, Cu 2 (Zn, Sn ) (S, Se) 4 and their derivatives. These derivatives may for example comprise Cu (In, Ga) Se2, CuInSe2, CuInS2, CuGaSe2, Cu2 (Zn, Sn) S4 or Cu2 (Zn, Sn) S e4, more commonly referred to as CIGS and CZTS.
    [0019] In order to complete the manufacture of this photosensitive device, the invention proposes a chamber 200 for a chemical bath shown diagrammatically in FIG. 2. As in most chemical baths for CBD deposits, the enclosure 200 can be closed by a lid 220. This chamber 200 contains a solution 50 consisting of a mixture of reagents in selected concentrations. The sample 100 rests in this solution 50. Heating means of this reaction medium may be provided. In FIG. 2, such a means is represented by a water bath 210 surrounding the chamber of the reaction medium. A motor 230 may also serve to actuate a stirring mechanism for stirring the solution 50. FIG. 2 also briefly illustrates the steps for obtaining the solution forming the reaction mixture 50. In the example illustrated in FIG. 2, the chemical bath is configured for depositing a buffer layer of a photovoltaic device. For this reason, it is prepared from a first aqueous solution comprising a metal salt 10, shown as zinc sulfate ZnSO4. A second aqueous solution comprising a sulfur precursor 20 is also provided. This second solution is represented as thiourea, of chemical formula CS (NH 2) 2. Ammonia 30 to provide a basic pH to the reaction mixture may also be provided as an option. A basic medium due to the presence of ammonia can promote the reaction of the precursor with the metal salt. Finally, a fourth aqueous solution comprising an organic additive 40 based on morpholine is prepared. This fourth solution 40 is represented as comprising morpholine of chemical formula C4H9NO. Alternatives to the first three solutions can be envisaged, as will be described later.
    [0020] These four solutions 10, 20, 30, 40 are then mixed to create a reaction mixture 50. This reaction mixture 50 constitutes the solution in which the sample 100 is quenched. Advantageously, the addition of morpholine considerably reduces the duration of the reaction. necessary to make a deposit of ZnS on the absorber. To illustrate the realized time gain, the diagram of Figure 3 compares the CBD deposition rates of a thin layer, measured under three different conditions. The deposited ZnS layer may comprise oxygen and form a Zn (S, O) or Zn (S, O, OH) type layer. Hereinafter, reference will be made to a ZnS layer for both a ZnS pure layer and a Zn (S, O) or Zn (S, O, OH) layer. Curve 301 shows the time required to deposit ZnS layers of different thicknesses when the reaction mixture 50 is in a conventional configuration. It is conventionally understood a thiourea concentration of 0.65 mol / L, a ZnSO4 concentration of 0.15 mol / L an ammonia concentration of 2 mol / L. The reagents were all preheated to a temperature of 80 ° C, before being placed in an enclosure heated to the same temperature of 80 ° C. Curve 302 represents the time required to deposit ZnS layers of different thicknesses, when the reaction mixture 50 comprises a laboratory tested configuration and corresponding to a particularly advantageous embodiment. It is characterized by a thiourea concentration of 0.4 mol / L, a ZnSO4 concentration of 0.1 mol / L and an ammonia concentration of 2 mol / L. No preheating of the reagents is expected and the temperature of the deposit is 70 ° C. Curve 303 represents the time required to deposit ZnS layers of different thicknesses, when the reaction mixture 50 has the same characteristics as those associated with curve 302, but with the addition of a concentration of 2.2 mol / hr. L morpholine. Table 1 below summarizes the three configurations described above.
    [0021] ZnS layer Thiourea ZnSO4 NH3 (mol / L) C4H9NO T deposit (° C) (mol / L) (mol / L) (mol / L) Deposit 0,65 0,15 2 80 conventional With additive 0,4 0 , 1 2 2.2 70 Without additive 0.4 0.1 2 70 Table 1: Summary of the three deposition configurations shown in Figure 3 It appears from the evolution of the three curves 301, 302 and 303 of the Figure 3, that the addition of C4H9NO in a chemical bath considerably increases the deposition rate of a ZnS layer. In particular, to obtain a 20 nm thick layer, the optimized bath according to the invention divides by 2.5 the deposition time compared with conventional techniques, and by more than 5 with respect to a deposit made in the same conditions without the organic additive. Furthermore, it should be noted that the conditions of deposition in the chemical bath of the applicant are more economical in raw material and energy. This results in lower concentrations of reagents, a lower deposition temperature and the absence of preheating reagents. The example described above may advantageously give rise to the production of a complete photovoltaic device as represented in FIG. 4.
    [0022] Fig. 4 schematically illustrates a thin-film solar cell comprising the same structural elements as those of Fig. 1. The illustrated device 400 further comprises a buffer layer 104 deposited by CBD on the absorber, as previously described. Above the buffer layer 104 a first window layer 105, for example of intrinsic zinc oxide or ZnMgO, may be deposited by known techniques such as reactive sputtering, chemical vapor deposition, electrodeposition, CBD deposition or an ILGAR® deposit. A front electrical contact 106 can then be deposited. It may for example be a zinc oxide layer ZnO doped aluminum. Other advantages specific to the use of the chemical bath described above for depositing a buffer layer are reflected in the performance of the photovoltaic devices obtained. Table 2 compares technical characteristics of solar cells such as the solar cell of Figure 4, including a CIGS chalcopyrite absorber. A first cell comprises a ZnS buffer layer obtained in the conventional deposition conditions described above in relation to the curve 301 of FIG. 3. A second cell comprises a ZnS buffer layer obtained by a CBD deposition process involving the object bath. of the invention, under conditions identical to those described in relation to the curve 303 of FIG. 3. A third cell comprises a CdS buffer layer obtained by CBD under conventional deposition conditions. Tamper layer Yield Voc Factor (mV) Jsc (%) Form (%) (mA / cm2) ZnS 13.7 71.8 611 31.3 Conventional CBD Standard Deviation +/- 0.41 +/- 1.9 +/- 3.3 +/- 0.52 ZnS 14.4 74.6 622 30.8 CBD with additive Standard deviation +/- 0.18 +/- 0.46 +/- 2 +/- 0.18 CdS 13.8 73.7 619 30.1 Conventional CBD Standard deviation +/- 0.13 +/- 0.36 +/- 4.6 +/- 0.15 Table 2: Comparison of the performances of three solar cells.
    [0023] Each cell of Table 2 has a surface of 5x5 cm 2, and a buffer layer of 20 nm thick. The columns in Table 2 represent four parameters for each of the three solar cells. The first column represents the conversion efficiency of the solar cell. The second column represents the shape factor of each cell, providing an indication of the quality of the junction between buffer layer and absorber. The third column represents an open circuit voltage Voc. The higher this voltage, the better the cell is in electrical terms. The fourth column represents the short circuit current Jsc. The higher this current, the better the cell is on the electrical plane. Moreover, for each cell of Table 2, and for each parameter, a standard deviation of the corresponding value is indicated. This information makes it possible to provide an estimate of the homogeneity of the cell. Indeed, the more a parameter varies within the cell itself, the higher the associated standard deviation. Such instability is indicative of structural defects in the cell, and a fortiori in the buffer layer which is the only layer showing substantial differences between the three compared cells. It emerges from the values in Table 2 that the cell having a ZnS buffer layer produced by the CBD deposition method developed in the context of the invention has a greater homogeneity than the other cells. In particular, it has a greater homogeneity than that of the cell having a ZnS layer produced by a conventional CBD deposit. Furthermore, the cell produced by the process of the invention has a higher conversion efficiency than other cells as well as better electrical properties.
    [0024] The cell shape factor obtained by the method of the invention is comparable to that of CdS buffer layer cells. Nevertheless, the overall homogeneity of the cell achieved by the CBD deposit with morpholine addition is better. Consequently, the morpholine-added deposition process may be well suited to the production of large-area photosensitive cells, or more generally, to the production of layers comprising metal and sulfur in an industrial environment.
    [0025] An observation under the electron microscope has confirmed these observations on the structural quality of the deposit obtained by the implementation of the method of the invention. The chemical bath developed and the method which uses it to produce a buffer layer make it possible to obtain, under suitable deposition conditions, a buffer layer made of a non-toxic material, for example free of cadmium. The improved electrical and optical properties of zinc sulphide and oxysulfide buffer layers were investigated by calculating the quantum efficiency of the layer, compared to that of a CdS buffer layer. FIG. 5 represents a diagram comparing the quantum efficiency between 300 nm and 1100 nm of a ZnS buffer layer, represented by the curve 502, with that of a CdS buffer layer, represented by the curve 501. The quantum efficiency is a parameter which reflects the ratio between the quantity of electrons produced and the quantity of photons received by the photosensitive device. It can be seen in FIG. 5 that a ZnS buffer layer results in better light conversion at wavelengths less than 500 nm. This gain in current can be explained by a greater light transmission coefficient in ZnS at these wavelengths compared to CdS. This optical property is itself derived from the web structure of the material, which has an electronic band gap of greater energy value than the CdS. The present invention is not limited to the embodiments described above by way of example; it also extends to other variants. Indeed, the bath described above and the method using this bath to make a thin layer comprising metal and sulfur can be declined in different configurations all benefiting from the deposition rate gain and the obtained layer quality described herein. -before. Thus, the concentrations of the various constituents of the reaction mixture 50 are adjustable. For reasons of economy, it is preferable to reduce the concentration of reagents. However, a reduction in concentrations tends to increase the time required to produce a thin layer of a given thickness. The examples described above correspond to a compromise between concentration and reaction rate. Other concentrations and temperatures may be expected to meet a different need. For example, it may be advantageous to adjust the concentrations and temperatures to deposit a given thickness of thin layer with a fixed time constraint.
    [0026] Indeed, because of a generally increased deposition rate, it is conceivable to use the CBD deposit employing morpholine as an additive to achieve in a reasonable time, for example less than an hour, layers of more 150 nm thick. By increasing the rate of deposition, it is possible to provide a low temperature of the reaction mixture. Compared with conventional deposition techniques generally involving temperatures of about 70 ° C., the invention makes it possible to obtain a deposition lasting less than 15 minutes even when the temperature falls below 60 ° C., for example up to 60 ° C. at 40 ° C. The compromise between the deposition rate and the concentration of the reagents can be considered as satisfactory for a metal salt concentration of between 0.01 mol / L and 1 mol / L, a sulfur precursor concentration of between 0.05 mol / L and 1 mol / L, a morpholine concentration of between 0.001 mol / L and 10 mol / L and an ammonia concentration of between 0.1 mol / L and 10 mol / L. On the other hand, the bath and the method that uses it can be envisaged without providing the addition of ammonia. It is possible, for example, to substitute it with another basic pH compound, or a pKa compound greater than 7, or to remove it from the bath. By removing this reagent, the CBD deposition process becomes even less expensive to implement, without negatively impacting the rate or quality of the deposit. At a minimum, the reaction mixture of the chemical bath may contain only morpholine, a sulfur precursor and a metal salt. From these basic constituents, the composition of the reaction mixture may differ from that described in detail above. In particular, it is conceivable to use other compounds based on morpholine, comprising functional groups of varying length. Advantageously, this compound confers on the solution a basic pH making it possible to ensure the hydrolysis of the sulfur precursor.
    [0027] The thiourea may also be replaced by other sulfur precursors preferably having equivalent chemical properties. In addition to zinc sulphate, the metal salt may be replaced by acetate or zinc chloride for the same applications as those described above. The zinc acetate may be anhydrous or hydrated, for example of the formula Zn [CH 3 COOH] 2. Moreover, as a metal salt, a salt based on indium or cadmium may also be suitable for producing buffer layers on photosensitive devices. Furthermore, since the deposition of a layer of sulfur and zinc takes place in an aqueous medium, there may be oxygen incorporation into the deposited layers forming a zinc oxysulfide of the Zn (S, O) or Zn type ( S, O, OH). Similarly, it is possible to incorporate oxygen in a layer comprising another metallic element, such as indium, to form an indium oxysulphide of the In x (S, O) y or In x type (S, O, 0H) 5 ,. However, the other elements of groups IIB and IIIA of the periodic table can also be considered as metal, because of their chemical properties similar to those of zinc, indium or cadmium. As mentioned above, it is possible to apply the method described above in other contexts than the deposition of a buffer layer on a photosensitive absorber. Indeed, the invention has also been successfully tested on other deposition surfaces such as glass, a semiconductor substrate and a metal.
    [0028] More generally, the invention described above optimizes a chemical bath for the deposition of a thin layer comprising sulfur and a metal. This optimization increases the speed of the deposit, while improving the structural quality of the layer obtained, and allows to consider material and energy savings. Furthermore, the invention has the advantage of being compatible with chemical baths for existing CBD chemical deposits, and offers an advantageous solution for large-scale industrial scale CBD deposits.
    权利要求:
    Claims (3)
    [0001]
    REVENDICATIONS1. Chemical bath for the deposition of a layer (104) based on at least metal and sulfur, the bath comprising in solution (50): a metal salt (10) comprising a metal chosen from at least one of the elements of the groups IIB and IIIA of the periodic table; and - a sulfur precursor (20); characterized in that the bath further comprises a morpholine type compound (40).
    [0002]
    2. Bath according to claim 1, characterized in that the compound (40) is of chemical formula C4H9NO.
    [0003]
    3. Bath according to one of the preceding claims, characterized in that a concentration of between 0.001 mol / L and 10 mol / L of morpholine (40) is provided in the bath, for a concentration of between 0.05 mol / l. L and 1 mol / L of the sulfur compound (20) .4. 5. 6. 7. Bath according to claim 3, characterized in that the solution containing the metal salt (10) is a solution chosen from: zinc sulfate, zinc acetate and zinc chloride with a concentration of between 0.01 mol / L and 1 mol / L. Bath according to one of claims 3 and 4, characterized in that it further comprises an ammonia solution (30) with a concentration of less than 10 mol / L. Bath according to one of claims 1 to 4, characterized in that it is free of ammonia solution. Bath according to one of the preceding claims, characterized in that the solution containing the sulfur compound (20) is a solution of thiourea CS (NH2) 2.8. Bath according to one of the preceding claims, characterized in that the metal is an element of the column IIB. 9. Bath according to claim 8, characterized in that the metal is zinc. 10. Process for the chemical deposition of a layer (104) based on at least metal and sulfur, in a bath comprising in solution (50): a metal salt (10) comprising a metal chosen from at least one of the elements of Groups IIB and IIIA of the Periodic Table; and - a sulfur precursor (20); characterized in that a morpholine compound (40) is further provided in said bath. 11. Process according to claim 10, characterized in that the layer (104) is based on metal sulphide. 12. The method of claim 10, characterized in that the layer (104) is based on metal oxysulfide. 13. Method according to one of claims 10 to 12, characterized in that the temperature of the bath during the deposition is between 40 ° C and 100 ° C. 14. The method according to one of claims 10 to 13, wherein the layer (104) based on metal and sulfur is deposited on a layer with photovoltaic properties, said layer with photovoltaic properties forming a thin-film solar cell absorber. 15. deposition process according to claim 14 characterized in that the absorber is based on a chalcopyrite compound among Cu (In, Ga) (S, Se) 2, Cu2 (Zn, Sn) (S, Se) 4 and their derivatives.
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    同族专利:
    公开号 | 公开日
    US20160312347A1|2016-10-27|
    WO2015087022A8|2015-11-12|
    JP6169283B2|2017-07-26|
    WO2015087022A1|2015-06-18|
    EP3080334A1|2016-10-19|
    TW201527592A|2015-07-16|
    FR3014909B1|2016-01-29|
    EP3080334B1|2021-09-22|
    JP2017502173A|2017-01-19|
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    法律状态:
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    2021-11-30| PLFP| Fee payment|Year of fee payment: 9 |
    优先权:
    申请号 | 申请日 | 专利标题
    FR1362539A|FR3014909B1|2013-12-12|2013-12-12|MORPHOLINE BATH AND METHOD FOR CHEMICAL DEPOSITION OF A LAYER.|FR1362539A| FR3014909B1|2013-12-12|2013-12-12|MORPHOLINE BATH AND METHOD FOR CHEMICAL DEPOSITION OF A LAYER.|
    TW103143576A| TW201527592A|2013-12-12|2014-12-12|Morpholine bath and method for chemical deposition of a layer|
    PCT/FR2015/050350| WO2015087022A1|2013-12-12|2015-02-12|Morpholine bath and method for chemically depositing a layer|
    US15/103,694| US20160312347A1|2013-12-12|2015-02-12|Morpholine bath and method for chemically depositing a layer|
    JP2016538718A| JP6169283B2|2013-12-12|2015-02-12|Morpholine bath and method for chemically depositing layers|
    EP15706911.3A| EP3080334B1|2013-12-12|2015-02-12|Morpholine bath and method for chemically depositing a layer|
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